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High Purity Tubing BA Series

Introduction

BA series are suitable for high purity and ultra-high purity fluid systems such as in the semiconductor industry. We adopt strict specifications for materials and machining processes, etc., as well as eliminates undesired contaminant residues through high standard cleaning and packaging process to meet high cleanliness and high-performance requirements of valves, fittings and tubing in the semiconductor manufacturing industry.

Feature

◎ Material: 316L

◎ Standards: ASTMA 269/A632

◎ Sizes: 1/4″-6″

◎ Process: internal surface cold worked followed by bright annealing to roughness of Ra≤20 μin (0.51 μm)

◎ Inspection: visual inspection, surface roughness measurement, particle testing, moisture testing

◎ Cleaning: ultrasonically cleaned, purged and dried

◎ Packaging: tubing ends are capped and tubing is packed in individual polyethylene bag

◎ Marking: tubing is marked with brand, material grade, standard, specification and heat number

◎ Standard length: 20 ft, 4 m and 6 m

Surface Roughness

Tube O.D. (D) mmExternal Surface μin. (μm)Internal Surface μin. (μm)
6.35≤D≤50.86Ra≤40 (1.0)Ra≤15 (0.38)
50.8<D≤101.6Ra≤20 (0.51)

Dimensional Tolerance and Working Pressure

Tube O.D.Wall ThicknessO.D. ToleranceWall Thickness ToleranceTubing LengthProcessW orking P ressures Psig
in.in.in. (mm)%mftSeamlessWelded-20 °F to 100 °F (-28°C to 37°C )
1/40.035+/-0.004 (0.10)+/-104 or 6205100
3/80.0353300
0.0494800
1/20.0352600
0.0493700
3/40.0492400
0.0653300
1”0.0491800
0.0652400
1.1/20.0651600
2”0.0651200
2.1/20.065950
3”0.065840
4”0.083780

High Purity Tubing EP Series

Introduction

EP series are suitable for high purity and ultra-high purity fluid systems such as in the semiconductor industry. We adopt strict specifications for materials, machining and electropolishing processes, etc., as well as eliminates undesired contaminant residues

through high standard cleaning and packaging process to meet high cleanliness and high-performance requirements of valves, fittings and tubing in the semiconductor manufacturing industry.

Feature

◎ Material: 316L

◎ Standards: ASTMA 269/A632

◎ Sizes: 1/4″-6

◎ Process: internal surface electropolished to roughness of Ra≤10μin (0.25μm),Ra≤7μin (0.18μm), Ra≤5μin (0.13μm); external surface roughness of Ra≤40 μin (1 μm)

◎Inspection: visual inspection, surface roughness measurement, particle test,moisture test, scanning electron microscopy (SEM), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (ESCA or XPS)

◎ Cleaning: ultrasonically cleaned, washed, rinsed, and purged and dried with high purity hot nitrogen in ISO Class 6 cleanroom

◎ Packaging: packaged in ISO Class 4 cleanroom, cleaned with ultra high pressure nitrogen, tubing ends are capped and tubing is packed in double polyethylene bags with inner bag filled with 99.999% nitrogen.

◎ Marking: packing bags are marked with brand, material grade, specification and heat number

◎ Standard length: 20 ft, 4 m and 6 m

Surface Roughness

Tube O.D. (D) mmExternal Surface μin. (μm)Internal Surface μin.(μm)
ABC
6.35≤D≤101.6Ra≤40 (1.0)Ra≤5 (0.13)Ra≤7 (0.18)Ra≤10 (0.25)

Dimensional Tolerance and Working Pressure

Tube O.D.Wall ThicknessO.D. ToleranceWall Thickness ToleranceTubing LengthProcessW orking P ressures Psig
in.in.in. (mm)%mftSeamlessWelded-20 °F to 100 °F (-28°C to 37°C )
1/40.035+/-0.004 (0.10)+/-104 or 6205100
3/80.0353300
0.0494800
1/20.0352600
0.0493700
3/40.0492400
0.0653300
1”0.0491800
0.0652400
1.1/20.0651600
2”0.0651200
2.1/20.065950
3”0.065840
4”0.083780

Tubing (BA or EP)

Size InchDimensions(mm)Weight Kg
DTL
1/4*0.0356.350.894 or 6 m, or 20 ft0.73
3/8*0.0359.530.891.15
1/2*0.04912.71.242.12
3/4*0.06519.051.654.30
1”*0.06525.41.655.85
1.1/2*0.06538.11.658.98
2”*0.06550.81.6512.16
2.1/2*0.06563.51.6515.30
3”*0.06576.21.6518.45
4”*0.083101.62.1131.49

90 ° Elbows (BA or EP)

Size InchDimensions(mm)
DTLBR
1/4*0.0356.350.8966.752.414.3
3/8*0.0359.530.8966.738.128.6
1/2*0.04912.71.2476.249.227
3/4*0.06519.051.6576.247.628.6
1”*0.06525.41.6576.238.138.1
1.1/2*0.06538.11.6595.338.157.2
2”*0.06550.81.65120.744.576.3
2.1/2*0.06563.51.65139.744.595.3
3”*0.06576.21.65158.844.5114.3
4”*0.083101.62.11203.250.8152.4

45 ° Elbows (BA or EP)

Size InchDimensions(mm)
DTLR
1/4*0.0356.350.8950.814.3
3/8*0.0359.530.8950.828.6
1/2*0.04912.71.2457.227
3/4*0.06519.051.6557.228.6
1”*0.06525.41.6557.238.1
1.1/2*0.06538.11.6563.557.2
2”*0.06550.81.6576.276.3
2.1/2*0.06563.51.6585.795.3
3”*0.06576.21.6592.1114.3
4”*0.083101.62.11114.3152.4

180 ° Elbows (BA or EP)

Size InchDimensions(mm)
DTLHR
1/4*0.0356.350.8966.79.657.2
3/8*0.0359.530.8966.79.657.2
1/2*0.04912.71.2476.219.157.2
3/4*0.06519.051.6576.219.157.2
1”*0.06525.41.6576.238.157.2
1.1/2*0.06538.11.65114.350.857.2
2”*0.06550.81.6512750.876.2
2.1/2*0.06563.51.65146.150.895.3
3”*0.06576.21.65165.150.8114.3
4”*0.083101.62.11215.963.5152.4

Coax Tubing 90 ° (BA or EP)

Size InchDimensions(mm)
D1T1D2T2Weight (Kg/m)
1/4*0.0356.350.8912.71.240.485
3/8*0.0359.530.8915.91.240.65
1/2*0.04912.71.2419.051.651.07
3/4*0.06519.051.6525.41.651.70
1”*0.06525.41.6538.11.652.49

Coax Elbows 90 ° (BA or EP)

D1T1D2T2L1L2R
1/4*0.0356.350.8912.71.24120.7101.738.1
3/8*0.0359.530.8915.91.24120.7111.757
1/2*0.04912.71.2419.051.65184.4163.485
3/4*0.06519.051.6525.41.65190.8165.485
1”*0.06525.41.6538.11.6510882.638.1

Coax Elbows 45 ° (BA or EP)

Size InchDimensions(mm)
1/4*0.0356.350.8912.71.2498.579.438.1
3/8*0.0359.530.8915.91.2498.579.457
1/2*0.04912.71.2419.051.65109.390.285
3/4*0.06519.051.6525.41.65135.6110.285
1”*0.06525.41.6538.11.6588.963.538.1

Equal Tees (BA or EP)

DTLH
1/4*0.0356.350.898944.5
3/8*0.0359.530.898944.5
1/2*0.04912.71.2495.247.6
3/4*0.06519.051.65101.650.8
1”*0.06525.41.6510854
1.1/2*0.06538.11.65120.660.3
2”*0.06550.81.6514673
2.1/2*0.06563.51.65158.879.4
3”*0.06576.21.65171.485.7
4”*0.083101.62.11209.6104.8

Reducing Tee (BA or EP)

Size InchDimensions(mm)
D1T1LHD2T2
3/8*1/49.530.898944.56.350.89
1/2*1/412.71.2495.247.66.350.89
1/2*3/812.71.2495.247.69.530.89
3/4*1/419.051.65101.650.86.350.89
3/4*3/819.051.65101.650.89.530.89
3/4*1/219.051.65101.650.812.71.24
1”*1/425.41.65108546.350.89
1”*3/825.41.65108549.530.89
1”*1/225.41.651085412.71.24
1”*3/425.41.651085419.051.65
1.1/2*1/238.11.65120.660.312.71.24
1.1/2*3/438.11.65120.660.319.051.65
1.1/2*1”38.11.65120.660.325.41.65
2”*1/250.81.6514666.712.71.24
2”*3/450.81.6514666.719.051.65
2”*1”50.81.6514666.725.41.65
2”*1.1/250.81.6514666.738.11.65
2.1/2*3/463.51.65158.87319.051.65
2.1/2*1”63.51.65158.87325.41.65
2.1/2*1.1/263.51.65158.87338.11.65
3”*1/276.21.65171.479.412.71.24
3”*3/476.21.65171.479.419.051.65
3”*1”76.21.65171.479.425.41.65
3”*1.1/276.21.65171.479.438.11.65
3”*2”76.21.65171.479.450.81.65
3”*2.1/276.21.65171.479.463.51.65
4”*1/2101.62.11209.692.112.71.24
4”*3/4101.62.11209.692.119.051.65
4”*1”101.62.11209.692.125.41.65
4”*1.1/2101.62.11209.692.138.11.65
4”*2”101.62.11209.698.450.81.65
4”*2.1/2101.62.11209.698.463.51.65
4”*3”101.62.11209.698.476.21.65

Coax Tees (BA or EP)

Size InchDimensions(mm)
D1T1D2T2D3T3D4T4L1L2H1H2
1/4*1/46.350.8912.71.246.350.8912.71.2412788.963.544.5
3/8*1/49.530.8915.91.246.350.8912.71.2412788.963.544.5
3/8*3/89.530.8915.91.249.530.8915.881.2412788.963.544.5
1/2*1/412.71.2419.051.656.350.8912.71.24133.495.366.747.6
1/2*3/812.71.2419.051.659.530.8915.881.24133.495.366.747.6
1/2*1/212.71.2419.051.6512.71.2419.051.65133.495.366.747.6
3/4*1/419.051.6525.41.656.350.8912.71.24133.495.366.747.6
3/4*3/819.051.6525.41.659.530.8915.881.24133.495.366.747.6
3/4*1/219.051.6525.41.6512.71.2419.051.65133.495.366.747.6
3/4*3/419.051.6525.41.6519.051.6525.41.65133.495.366.747.6
1”*1/425.41.6538.11.656.350.8912.71.24158.910879.454
1”*3/825.41.6538.11.659.530.8915.881.24158.910879.454
1”*1/225.41.6538.11.6512.71.2419.051.65158.910879.454
1”*3/425.41.6538.11.6519.051.6525.41.65158.910879.454
1”*1”25.41.6538.11.6525.41.6538.11.65158.910879.454

Concentric Reducers (BA or EP)

Size InchDimensions(mm)
D1T1LD2T2
3/8*1/49.530.8941.36.350.89
1/2*1/412.71.24386.350.89
1/2*3/812.71.24389.530.89
3/4*1/419.051.6550.86.350.89
3/4*3/819.051.6550.89.530.89
3/4*1/219.051.656012.71.24
1”*1/425.41.65606.350.89
1”*3/825.41.65609.530.89
1”*1/225.41.656012.71.24
1”*3/425.41.655419.051.65
1.1/2*1/238.11.658012.71.24
1.1/2*3/438.11.6576.219.051.65
1.1/2*1”38.11.6563.525.41.65
2”*3/450.81.6585.719.051.65
2”*1”50.81.6585.725.41.65
2”*1.1/250.81.6563.538.11.65
2.1/2*3/463.51.6510019.051.65
2.1/2*1”63.51.6510025.41.65
2.1/2*1.1/263.51.6585.738.11.65
3”*1.1/276.21.6510838.11.65
3”*2”76.21.6585.750.81.65
3”*2.1/276.21.6566.763.51.65
4”*2”101.62.1113050.81.65
4”*2.1/2101.62.1110863.51.65
4”*3”101.62.1198.476.21.65

Excentric Reducers (BA or EP)

Size InchDimensions(mm)
D1T1LD2T2
3/8*1/49.530.8941.36.350.89
1/2*1/412.71.24386.350.89
1/2*3/812.71.24389.530.89
3/4*1/419.051.6550.86.350.89
3/4*3/819.051.6550.89.530.89
3/4*1/219.051.656012.71.24
1”*1/425.41.65606.350.89
1”*3/825.41.65609.530.89
1”*1/225.41.656012.71.24
1”*3/425.41.655419.051.65
1.1/2*1/238.11.658012.71.24
1.1/2*3/438.11.6576.219.051.65
1.1/2*1”38.11.6563.525.41.65
2”*3/450.81.6585.719.051.65
2”*1”50.81.6585.725.41.65
2”*1.1/250.81.6563.538.11.65
2.1/2*3/463.51.6510019.051.65
2.1/2*1”63.51.6510025.41.65
2.1/2*1.1/263.51.6585.738.11.65
3”*1.1/276.21.6510838.11.65
3”*2”76.21.6585.750.81.65
3”*2.1/276.21.6566.763.51.65
4”*2”101.62.1113050.81.65
4”*2.1/2101.62.1110863.51.65
4”*3”101.62.1198.476.21.65

COAX Sleeves (BA or EP)

SizeDimensions(mm)
InchmmD1D2L
1/46.3512.9015.88101.6
3/89.5316.1119.05101.6
1/212.7019.3022.23101.6
3/419.0525.6030.00101.6
1”25.4038.4042.40101.6

COAX Terminators (BA or EP)

InchD1T1D2T2L
1/46.350.8912.701.2425.4
3/89.530.8915.881.6525.4
1/212.701.2419.051.6525.4
3/419.051.6525.401.6531.75
1”25.401.6538.101.6531.75

Clamps, Ferrules, Gasktes & Caps (BA or EP)

FerruleGasket FKMCap SS316L
Size InchMaterialDimensions(mm)
DTLARa μmSizeBC
1/4SS316L6.350.8944.5250.86.35*25254.75
3/8SS316L9.530.8944.5250.89.53*25254.75
1/2*SS316L12.71.2444.5250.812.7*25254.75
3/4SS316L19.051.6544.5250.819.05*25254.75
1”SS316L25.41.6544.550.50.825.4*50.550.56.35
1.1/2SS316L38.11.6544.550.50.838.1*50.550.56.35
2”SS316L50.81.6557.2640.850.8*64646.35
2.1/2SS316L63.51.6557.277.50.863.5*77.577.56.35
3”SS316L76.21.6557.2910.876.2*91916.35
4”SS316L101.62.1157.21190.8101.6*1191198

Фото и чертежи

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